氣浮載台 (面板/光電業)



	

		

			

				

傳統 TFT-LCD 玻璃基板是採用機械手臂(Robots)、AGV(Automated guided
vehicle)系統等作業方式來進行大型玻璃基板的搬運和移載。在生產過程中玻璃基板
與移載平台(或滾輪)是屬於接觸式作業,玻璃基板與移載平台或滾輪接觸時,因接
觸及摩擦的關係引起基板缺角、破裂、損傷、污染、靜電等問題會對玻璃基板之表面
造成損傷或缺陷,進而影響生產良率與產品品質,此外採用滾輪進行旋轉移載時,仍
有技術問題需要克服。這些問題對大尺寸玻璃基板之生產效率影響深遠,急需迫切改
善。若能以非接觸式氣浮平台技術來取代傳統接觸式移載技術所衍生的問題,將會是
有效的解決方式。
 
非接觸式氣浮平台移載:
非接觸式輸送及移載設備主要為改善傳統搬運技術在玻璃基板變大之後所引發的
問題,因為在輸送與移載過程中是不會直接接觸到作業物件,所以可以避免污染物附
著、應力、靜電及損傷玻璃基板的情形發生,而多孔性材質(Porous material)可大幅降低氣體流量,
還能達到氣墊層均勻氣壓及良好的分布並能提供足夠的作業所需漂浮高度。
 
氣浮移載系統的優點:
1、零摩擦力(Zero friction)
2、零耗損(Zero wear)
3、直線運動(Straight motion)、旋轉運動(Rotation motion)皆適用
4、操作平穩且無聲(Silent and smooth operation)
5、高阻尼(Higher damping)
6、免除潤滑用油(Eliminate oil)
7、可高速作業(High speeds)
 

Air Floating Tables (Panel/Optoelectronic Industry)

Conventionally, robotic arms or automated guided vehicles are employed to move or handle large TFT-LCD glass substrates. In the manufacturing process, glass substrates typically are exposed to the transfer platform (or rollers). However, contact and friction between the substrates and surfaces may generate static electricity or chip, crack, damage, or contaminate the surface of the substrate, which negatively affects yield and product quality. In addition, many technical challenges remain unresolved for the adoption of roller transfer. These challenges hinder the production efficiency of large glass substrates significantly and are in dire need of improvement. An effective solution would be replacing traditional contact-type transfer with no-contact transfer approaches, such as the application of air-floating tables.

 

Transfer using no-contact air floating tables:

No-contact conveyance and transfer equipment alleviate a number of transfer issues that have emerged as larger glass substrates are produced. In no-contact transfer and handling processes, the substrate is not exposed to the equipment, thereby avoiding substrate contamination, stress damage, and static electricity build-up. Moreover, the porous material drastically reduces airflow while creates an evenly distributed air cushion that can be adjusted to meet floating height requirements.

 

Advantages of air floating transfer systems:

1. Zero friction

2. Zero wear

3. Supports linear transfer and rotation

4. Silent and smooth operation

5. Higher damping

6. No lubricants required

7. High-speed operation